Development of MEMS-Based Vibration Sensor for Tunnel Construction and Maintenance Monitoring System

Recently, the demand for sensor technology has increased remarkably in all industrial fields. Sensor technology is closely related to cutting-edge technologies such as semiconductor technology and minute structure building technology, and thus, the high demand for small and light devices with high performance provides the impetus for conducting studies in order to develop sensors with much better performance. In this study, we developed a MEMS-based vibration sensor for tunnel construction and maintenance monitoring system. For this, we investigated the definition and summary of MEMS technology and also analyzed the types and characteristics of MEMS processing technology and the strong points of MEMS technology. We also analyzed current research results on sensor applications based on MEMS for construction. The types of work, characteristic and frequency of tunnel measurement, and investigated the characteristics of measuring instruments for doing the pertinent works are analyzed. We manufactured the MEMS vibration sensor for tunnel construction in order to measure blast vibration and we also measured the vibration through experiments.