Filter Leak Tester for Semiconductor/LCD Clean Rooms

Previous leak tests for ceiling filters of semiconductor/LCD clean rooms were performed manually and so it was difficult to reduce their time and cost. Therefore, we developed a filter leak tester with an automatic probe scanner and a manual lift mechanism on a truck. One of the merits of the tester is a mask for isolating air blowing in from outside. The leak test can be easily performed without setting polyethylene sheets to mask each filter. In this paper, we describe the specifications and functions of the filter leak tester. We also present the results of using the tester at the actual construction site of a semiconductor clean room, and evaluate the effects.