Publications / 1988 Proceedings of the 5th ISARC, Tokyo, Japan

Development of a Fully Automatic Clean Room Measuring System

Akira Ohsakaya
Pages 785-792 (1988 Proceedings of the 5th ISARC, Tokyo, Japan, ISSN 2413-5844)

The more highly the performance of clean rooms is required, the more frequently and closely we must measure and analyze the environment of them, not only as built facility but also as operating facility. Fully automatic clean room measuring system “CLEAN-WATCHER” has been developed in order to automatically measure and analyze the particle concentration, temperature, humidity, wind velocity distribution and to carry out scan test of filters attached on ceiling, at any position in down flow clean rooms without attendance of operator. This paper describes the outline of this system.

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